教师介绍

郭 彤

来源:更新时间:2018-06-28

姓 名 郭彤
职 称 副教授
所在系别 精密仪器工程系
所属课题组 微纳制造与测试研究所
联系电话 022-27892691
电子邮件 guotong@tju.edu.cn
办公地址 第5教学楼215室
主讲课程 数字信号处理器(DSP)、自动控制原理、信号检测与处理、
误差理论与数据处理、微纳检测技术
导师类型 仪器科学与技术—博导/硕导
通讯地址 天津大学精密仪器与光电子工程学院
邮政编码 300072

个人经历或学术经历
  1. 1995.9-1999.7 天津大学 测控技术与仪器/科技英语 双学士
  2. 1999.9-2002.3 天津大学 测试计量技术及仪器 硕士
  3. 2002.3-2005.1天津大学 测试计量技术及仪器 博士
  4. 2003.6-2003.11 德国Ilmenau工业大学 进修
  5. 2005.1-2006.12 天津大学 光学工程 博士后
  6. 2006.7-2006.10 德国Aachen工业大学 高级访问学者
  7. 2006.11- 天津大学 副教授
  8. 2008.10-2008.12 德国Ilmenau工业大学 高级访问学者
  9. 2017.9-2018.2 英国Huddersfield大学 访问学者

研究方向

    光学测试技术、扫描探针测试技术、微纳坐标测量技术、纳米加工技术

科研项目、成果和专利

在研项目:

  1. 国家重点研发计划项目子课题-“基于纳米位移平台的白光干涉测量与纳米装配应用开发(2017YFF0105905)”(负责人)
  2. 国家重点研发计划项目子课题-“晶圆级微结构三维形貌测量技术及集成光学测量仪器开发(2017YFF0107001)”(参加人)
  3. 国家自然科学基金面上项目-“基于双频激励动态调制AFM的高分辨亚表面结构表征系统与方法研究(51675379)”(负责人)

完成项目:

  1. 天津市应用基础与前沿技术研究计划重点项目-“微阵列型复杂曲面光学反射镜的复合测量方法与系统(14JCZDJC39400)”(负责人)
  2. 国家科技支撑计划项目-“计量型扫描电镜及双探针扫描探针显微镜标准测量装置的建立(2011BAK15B02)”(合作单位负责人)
  3. 国家公益性行业项目-“微结构三维几何参数标准装置(201110051)”(合作单位负责人)
  4. 国家自然科学基金“纳米制造的基础研究”重大研究计划培育项目-“基于复合式测量方法的超精密元件跨尺度几何量计量与多参数评价(91023022)”(负责人)
  5. 天津市应用基础与前沿技术研究计划项目-“基于倾斜扫描干涉术的微器件几何量大范围测试方法研究(09JCYBJC05300)”(负责人)
  6. 教育部博士点新教师基金项目-“基于时间平均显微干涉术的MEMS运动表征技术研究(20070056072)”(负责人)
  7. 博士后科学基金项目-“微机电系统大范围高精度多参数实时测量技术的研究(2005037527)”(负责人)

授权专利:

  1. 基于新型音叉探针的双频原子力测试系统与方法 (ZL 201510232561.9 2017.12.5)
  2. 微阵列型复杂曲面光学元件的复合测量系统与方法 (ZL 201410181248.2 2016.5.4)
  3. 基于离轴显微干涉术的微结构测试系统及方法 (ZL 201310631889.9 2016.5.11)
  4. 基于纳米测量与倾斜扫描白光干涉微结构测试系统及方法 ( ZL 201010274207.X 2012.1.11 )
  5. 基于步进电机的量块自动检定装置 (ZL 201010134308.7 2011.11.02)

国家标准:

  1. GB/T 34900-2017 微机电系统(MEMS)技术 基于光学干涉的MEMS微结构残余应变测量方法(第一完成人) 2017-11-1发布
  2. GB/T 34894-2017 微机电系统(MEMS)技术 基于光学干涉的MEMS微结构应变梯度测量方法(第二完成人)2017-11-1发布 天津大学第二单位
  3. GB/T 34893-2017 微机电系统(MEMS)技术 基于光学干涉的MEMS微结构面内长度测量方法(第二完成人) 2017-11-1发布

论文、专著

近期学术论文:


  1. 1) Tong Guo, Lin Yuan, Zhuo Chen, Minghui Li, Xing Fu and Xiaotang Hu, Single Point Linnik White-light Spectral Microscopic Interferometer for Surface Measurement, Surface Topography: Metrology and Properties, 2018, 6(3): 034008
  2. 2) Zhenyuan Song, Tong Guo*, Xing Fu, Xiaotang Hu, Residual vibration control based on a global search method in a high-speed white light scanning interferometer, Applied Optics, 2018, 57(13): 3415-3422
  3. 3) Tong Guo, Zhuo Chen, Minghui Li, Juhong Wu, Xing Fu, Xiaotang Hu, Film thickness measurement based on nonlinear phase analysis using a Linnik microscopic white-light spectral interferometer, Applied Optics, 2018, 57(12): 2955-2961
  4. 4) Tong Guo, Bingtong Li, Minghui Li, Jinping Chen, Xing Fu, Xiaotang Hu, Phase extracting algorithms analysis in the white-light spectral interferometry, Proceedings of SPIE, 2018, 10621: 106210O
  5. 5) Shimiao Li, Tong Guo*, Lin Yuan, Jinping Chen, A method for surface topography measurement using a new focus function based on dual-tree complex wavelet transform, Proceedings of SPIE, 2018, 10621: 1062112
  6. 6) Zhou Yong, Guo Tong, Non-linear phase noise processing method in thin film measurement with the frequency domain white light microscopic interferometry, Proceedings of SPIE, 2017, 10605: 1060548
  7. 7) Tong Guo, Minghui Li, Yong Zhou, Lianfeng Ni, Xing Fu, Xiaotang Hu, Wavelength correction for thin film measurement in a microscopic white light spectral interferometer, Optik, 2017, 145: 188-201
  8. 8) Zhichao Wu, Tong Guo*, Ran Tao, Linyan Xu, Jinping Chen, Xing Fu, Xiaotang Hu, The model analysis of a complex tuning fork probe and its application in bimodal atomic force microscopy, Applied Sciences, 2017, 7(2): 121
  9. 9) Tong Guo, Juhong Wu, Lianfeng Ni, Xing Fu, Xiaotang Hu, Initial estimation of thin film thickness measurement based on white light spectral interferometry, Thin Solid Films, 2016, 612: 267-273
  10. 10) Tong Guo, Feng Li, Jinping Chen, Xing Fu, Xiaotang Hu, Multi-wavelength phase-shifting interferometry for micro-structures measurement based on color image processing in white light interference, Optics and Lasers in Engineering, 2016, 82: 41-47
  11. 11) Zhichao Wu, Tong Guo*, Ran Tao, Leihua Liu, Jinping Chen, Xing Fu, Xiaotang Hu, A Unique Self-Sensing, Self-Actuating AFM Probe at Higher Eigenmodes, Sensors, 2015, 15(11): 28764-28771
  12. 12) Guo Tong, Gu Yue, Chen Jinping, Fu Xing, Hu Xiaotang, Surface topography measurement based on color images processing in white light interferometry, Proceedings of SPIE, 2015, 9525: 952511
  13. 13) Tong Guo, Lianfeng Ni, Long Ma, Jinping Chen, Xing Fu, Xiaotang Hu, Measurement of step height using white light spectral interferometry, Key Engineering Materials, 2015, 625: 326-331
  14. 14) 郭彤,李峰,倪连峰,陈津平,傅星,胡小唐,基于白光干涉彩色图像测量微结构的表面形貌,光学学报,2014,34(2): 0212003
  15. 15) Wang Longlong, Lu Mingzhen, Guo Tong, Gao Sitian, Zhang Huakun, Simulation and signal analysis of Akiyama probe applied to atomic force microscope, Proceedings of SPIE, 2013, 8916: 89160W
  16. 16) Guo Tong, Chen Weijia, Wu Zhichao, Chen Jinping, Fu Xing, Hu Xiaotang, Phase modulation dynamic AFM measurement system based on tuning fork probe, Proceedings of SPIE, 2013, 8916: 89160X
  17. 17) Yan Bian, Tong Guo, Feng Li, Siming Wang, Xing Fu, Xiaotang Hu, Large step structure measurement by using white light interferometry based on adaptive scanning , Proceedings of SPIE, 2013, 8759: 87594T
  18. 18) Jinping Chen, Tong Guo, Longlong Wang, Zhichao Wu, Xing Fu, Xiaotang Hu, Microscopic Fringe Projection System and Measuring Method, Proceedings of SPIE, 2013, 8759: 87594U
  19. 19) Zhichao Wu, Tong Guo, Jinping Chen, Xing Fu, Xiaotang Hu, The measurement of optical reflector with complex surface using nano-CMM, Proceedings of SPIE, 2012, 8557: 85570T
  20. 20) Tong Guo, Longlong Wang, Jinping Chen, Xing Fu, Xiaotang Hu, Development of a large-range atomic force microscope measuring system for optical free form surface characterization, Measurement Science and Technology, 2012, 23(11): 115401
  21. 21) Tong Guo, Siming Wang, Dante J. Dorantes-Gonzalez, Jinping Chen, Xing Fu, Xiaotang Hu, Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry, Sensors, 2012, 12(1): 175-188
  22. 22) Tong Guo, Ying Zhang, Siming Wang, Long Ma, Xing Fu, Xiaotang Hu, Micro-structure characterization based on white-light interferometry, Proceedings of SPIE, 2012, 8335: 833509
  23. 23) Tong Guo, Siming Wang, Jian Zhao, Jinping Chen, Xing Fu, Xiaotang Hu, Development and calibration of a compact self-sensing atomic force microscope head for micro-nano characterization, Proceedings of SPIE, 2011, 8321: 83213G
  24. 24) Tong Guo, Long Ma, Jian Zhao, Dante J. Dorantes-Gonzalez, Xing Fu, Xiaotang Hu, A nanomeasuring machine based white light tilt scanning interferometer for large scale optical array structure measurement, Optics and Lasers in Engineering, 2011, 49 (9-10): 1124-1130
  25. 25) Tong Guo, Long Ma, Jinping Chen, Xing Fu, Xiaotang Hu, MEMS surface characterization based on white light phase shifting interferometry, Optical Engineering, 2011, 50(5): 053606
  26. 26) J. Zhao, T. Guo*, L. Ma, X. Fu, X. Hu, Metrological atomic force microscope with self-sensing measuring head, Sensors and Actuators A : Physical, 2011, 167(2): 267-272
  27. 27) Zonghua Zhang, Haiyan Ma, Tong Guo, Sixiang Zhang, Jinping Chen, Simple, flexible calibration of phase calculation based three-dimensional imaging system, OPTICS LETTERS, 2011, 36(7): 1257-1259
  28. 28) Zhang Zonghua, Ma Haiyan, Zhang Sixiang, Guo Tong, Towers Catherine E., Towers David P., Simple calibration of a phase-based 3D imaging system based on uneven fringe projection, OPTICS LETTERS, 2011, 36(5): 627-629
  29. 29) Jian Zhao, Tong Guo, Long Ma, Xing Fu, Xiaotang Hu, Novel Tuning Fork Atomic Force Microscope for Optical Surfaces Characterization, Proceedings of SPIE, 2010, 7656: 76560G
  30. 30) Bian, Yan, Guo, Tong, Step height evaluation in the vibrating condition based on microscopic interferometry, Proceedings of SPIE, 2010, 7656: 76562H
  31. 31) Tong Guo, Zhichao Wu, Long Ma, Xing Fu, and Xiaotang Hu, Dynamic MEMS characterization system using differential phase measurement method, Proceedings of SPIE, 2010, 7544: 75444W
  32. 32) Zonghua Zhang, Tong Guo, Sixiang Zhang, Xing Fu, Xiaotang Hu, Catherine E. Towers,David P. Towers, Fast and flexible calibration of a phase-based 3-D imaging system by uneven fringe projection, Proceedings of SPIE, 2010, 7790: 77900D
  33. 33) Long Ma, Tong Guo, Fang Yuan, Jian Zhao, Xing Fu, Xiaotang Hu, Thick film geometric parameters measurement by white light interferometry, Proceedings of SPIE, 2009, 7507: 75070G
  34. 34) Tong Guo, Hong Chang, Jinping Chen, Xing Fu, Xiaotang Hu, Micro-motion Analyzer used for Dynamic MEMS Characterization, Optics and Lasers in Engineering, 2009, 47(3-4): 512-517
  35. 35) Jinping Chen, Tong Guo, Xiaodong Hu, Xiaotang Hu, Analysis on vibration rejection ratio of scanning probe microscope, J. Vac. Sci. Technol. B, 2009, 27(3): 1413-1417
  36. 36) Li Yanning, Li Wen, Guo Tong, Yan Zhidan, Fu Xing, Hu Xiaotang, Study on structure optimization of a piezoelectric cantilever with a proof mass for vibration-powered energy harvesting system, J. Vac. Sci. Technol. B, 2009, 27(3): 1288-1290
  37. 37) Bian, Yan, Guo, Tong, Zhang Guoxiong, Measuring Method of the Workpieces' Shoulder Characteristic Size Based on Structured Light, Proceedings of SPIE, 2008, 7129: 71290A
  38. 38) Guo Tong, Chen Jin-ping, Fu Xing, Hu Xiao-tang, Microscopic interferometry for dimensional characterization of MEMS devices, Proceedings of SPIE, 2007, 6724: 67240S
  39. 39) Jinping Chen, Tong Guo, Xiaodong Hu, Xiaotang Hu, Experimental Study on External Low Frequency Vibration Influence on SPM , TRANSACTIONS OF TIANJIN UNIVERSITY, 2007, 13(2): 98-102
  40. 40) Hu Xiaodong, Hu Chunguang, Chen Zhi, Guo Tong, Hu Xiaotang, Measuring in-plane and out-of-plane coupled motions of microstructures by stroboscopic microscopic interferometry, Optics and Laser Technology, 2007, 39(6): 1176-1182
  41. 41) T. GUO, J.P. CHEN, D. Dontsov, X. FU, X.T. HU, G. Jaeger, Improved homodyne laser interferometer used in micro-vibration analysis, Proceedings of SPIE, 2006, 6150: 457-462
  42. 42) Guo Tong, Hu Chun-guang, Chen Jin-ping, Fu Xing, Hu Xiao-tang, Scanning white-light interferometry for microstructures geometrical characterization, Proceedings of SPIE, 2006, 63573O: O3573-O3573
  43. 43) Chen Jin-ping, Guo Tong, Fu Xing, Hu Xiao-tang, Application of miniature interferometers in nano measuring and positioning technology, Proceedings of SPIE, 2006, 63574A: A3574-A3574
  44. 44) Hu Xiaodong, Liu Gang, Hu Chunguang, Guo Tong, Hu Xiaotang, Characterization of static and dynamic microstructures by microscopic interferometry based on a Fourier transform method, Measurement Science and Technology, 2006, 17 (6): 1312-1318
  45. 45) Hu, XD, Guo, T, Fu, X, Hu, XT, Nanoscale oxide structures induced by dynamic electric field on Si with AFM, Applied Surface Science, 2003, 217(1-4): 34-38

专著:

  1. [1] 房丰洲,宫虎,张效栋,郭彤,2009,复杂曲面加工领域科学技术发展研究,机械工程学科发展报告,中国科学技术出版社。
  2. [2] 胡小唐,傅星,刘庆纲,李艳宁,胡晓东,郭彤,2009,微纳检测技术,天津大学出版社。
  3. [3] Tong Guo, Long Ma, Yan Bian, “MEMS characterization based on optical measuring methods” for book “Microelectromechanical Systems and Devices”(ISBN: 978-953-51-0306-6), Intech publisher, 2012.

奖励、荣誉和学术兼职
  1. 荣获第八届高等教育天津市级教学成果二等奖(14)
  2. 荣获2013年教育部技术发明一等奖(3) 
  3. 荣获2003年教育部科技进步一等奖(19)
  4. 荣获“天津大学2016年度本科生毕业设计最佳指导教师”
  5. 荣获“天津大学2006年度优秀博士学位论文”奖
  6. 全国专业标准化技术委员会纳米检测工作组委员
  7. 高等教育学会仪器科学及测控技术专业委员会委员
  8. 全国产品几何技术规范(GPS)标准化技术委员会观察员
  9. 全国误差与不确定度研究会理事
  10. SPIE会员
  11. 光学学会、机械工程学会、微米纳米技术学会高级会员
  12. 中国科技论文在线、纳米技术与精密工程、光学学报、光学精密工程、中国激光、浙江大学学报、东北大学学报、激光与光电子学进展、Chinese Optics Letters、Ultramicroscopy、Optics and Laser Engineering、Sensors and Actuators A:Physical、Journal of Modern Optics、Microscopy Research and Technique、International Journal of Robust and Nonlinear Control、International Journal of Advanced Manufacturing Technology、International Journal of Nanomanufacturing等期刊审稿人
  13. 国家自然科学基金评审专家
  14. 教育部学位中心通讯评议专家

 

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教学链接

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